Silicon is a promising platform for making spin qubits in quantum computing, because of the long intrinsic coherence time and compatibility with advanced semiconductor manufacturing technology. Taking these advantages high-fidelity quantum operations have been achieved and industrial approaches have been employed to fabricate multi-qubit devices. In this talk I will review updated development of high control fidelities of single- and two-qubit gates [1, 2]. Based on the results of the two-qubit experiments we have developed three qubit operations necessary for implementing quantum error correction, including generation of a three-spin entangled state  and a Toffoli gate, and finally achieved the three qubit phase error correction . Lastly I will discuss the charge noise effects to influence the qubit fidelity in multi-qubit devices. We observe a strong noise correlation between qubits, which may influence the performance of multi-qubit entanglement as well as quantum error correction.
 J. Yoneda et al., Nature Nanotechnol. 13, 102 (2018).
 A. Noiri et al., Nature 601, 338 (2022).
 K. Takeda et al. Nature Nanotechnol. 16, 965 (2021).
 K. Takeda et al. Nature 608, 882 (2022).
 J. Yoneda et al. arXiv: 2208.14150.