Coplanar waveguide resonators integrated into a Si FinFET spin qubit platform
Eoin Kelly, Leonardo Massai, Nico Hendrickx, Matthias Mergenthaler, Stephan Paredes, Felix Schupp, Peter Müller, Michele Aldeghi, Noelia Vico Trivino, Patrick Harvey-Collard, Andreas Fuhrer, Gian Salis
High-impedance resonators facilitate single-shot readout of spin qubits and are investigated as a mean to couple spin qubits over larger distances. We have fabricated coplanar waveguide resonators with impedances above 1 kOhm using superconducting NbN and TiN films with kinetic sheet inductance between 70 and 150 pH/square. With films deposited on intrinsic silicon, internal Q factors of 100’000 are reached at low photon numbers. Coplanar waveguide resonators are attached to a feedline in a hanger-type geometry for multiplexed read-out. We present results on lambda/2 resonators with filtered bias taps that are integrated into our FinFET spin qubit platform.